ACOUSTIC WAVE DEVICE
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United States of America Patent
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Issued Date -
Aug 15, 2024
app pub date -
Dec 12, 2023
filing date -
Feb 13, 2023
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Abstract
An acoustic wave device includes a support substrate, a piezoelectric layer on the support substrate and including first and second principal surfaces, first and second IDT electrodes respectively on the first and second principal surfaces, and a dielectric film at least provided at one of a position between the first principal surface and the first IDT electrode, and a position between the second principal surface and the second IDT electrode. Each of the dielectric film and the piezoelectric layer includes one of Li, Ta, and O or Li, Nb, and O. At least one of a polarization direction, an element included in a material, and a composition of the material is different between the dielectric film and the piezoelectric layer.
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