POLISHING COMPOSITION FOR SEMICONDUCTOR PROCESS AND METHOD FOR POLISHING A SUBSTRATE USING THE SAME

United States of America Patent

Stats

N/A
Issued Date
Aug 15, 2024
app pub date
Jan 5, 2024
filing date
Feb 14, 2023

priority date (Note)
Published

status (Latency Note)

Importance

Loading Importance Indicators... loading....

Abstract

A polishing composition for a semiconductor process includes polishing particles. The polishing particles have a Ds value of 700 nm²to 1400 nm²according to Equation 1 below;

Loading the Abstract Image... loading....

First Claim

See full text

loading....

all claims.. loading....

Family

Loading Family data... loading....

Patent Owner(s)

Patent Owner	Address
SK ENPULSE CO LTD	1043 GYEONGGI-DAERO GYEONGGI-DO PYEONGTAEK-SI 17784

International Classification(s)

[Classification Symbol]

[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
HAN, Deok Su	Seoul, KR	18	0
HONG, Seung Chul	Seoul, KR	22	63
KIM, Hwan Chul	Seoul, KR	43	369
PARK, Han Teo	Seoul, KR	19	3

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Feb 15, 2028
7.5 Year Payment	$3600.00	$1800.00	$900.00	Feb 15, 2032
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Feb 15, 2036

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Follows in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

FREE	$9.95/mo		$39.95/mo	$99.95/mo

PAIR Watch Weekly Update		$2.75/mo/patent		$2.65/mo/patent
PAIR Watch Daily Update		$5.75/mo/patent		$5.55/mo/patent
Upgrade Now	Upgrade Now		Upgrade Now	Upgrade Now

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Watches in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

FREE	$9.95/mo		$39.95/mo	$99.95/mo

PAIR Watch Weekly Update		$2.75/mo/patent		$2.65/mo/patent
PAIR Watch Daily Update		$5.75/mo/patent		$5.55/mo/patent
Upgrade Now	Upgrade Now		Upgrade Now	Upgrade Now

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Follows in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

POLISHING COMPOSITION FOR SEMICONDUCTOR PROCESS AND METHOD FOR POLISHING A SUBSTRATE USING THE SAME

Number of patents in Portfolio can not be more than 2000

United States of America Patent

18404979

Stats

Importance

Abstract

First Claim

Family

Patent Owner(s)

International Classification(s)

Inventor(s)

Cited Art Landscape

Patent Citation Ranking

Forward Cite Landscape

Maintenance Fees

Full Text

Legal Events

Matter Detail

Renewals Detail

Load PAIR data

Payment Failure

Cancel Scheduled Update

Remove Watch on PAIR

Update PAIR data

PAIR load has been initiated

File History PDF

Add Patents to Portfolio

APP PUB NO	20240274439A1
SERIAL NO	18404979
DOCKET NO

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Please Confirm Your Upgraded Plan Purchase By Selecting Upgrade Button

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Please Confirm Your Upgraded Plan Purchase By Selecting Upgrade Button

18404979

Stats

Importance

Abstract

First Claim

Family

Patent Owner(s)

International Classification(s)

Inventor(s)

Cited Art Landscape

Patent Citation Ranking

Forward Cite Landscape

Maintenance Fees

Full Text

Legal Events

Matter Detail

Renewals Detail

Load PAIR data

Payment Failure

Cancel Scheduled Update

Remove Watch on PAIR

Update PAIR data

PAIR load has been initiated

File History PDF

Add to Portfolio(s)

Important Notes on Latency of Status data

Important Note on Priority Date data