PLASMA-RESISTANT GLASS, CHAMBER INTERIOR PARTS FOR SEMICONDUCTOR MANUFACTURING PROCESS, AND METHODS FOR MANUFACTURING SAME
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Aug 15, 2024
app pub date -
May 13, 2022
filing date -
Jun 4, 2021
priority date (Note) -
Published
status (Latency Note)
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Abstract
The present invention relates to a plasma-resistant glass, chamber interior parts for a semiconductor manufacturing process, and methods for manufacturing same, and specifically, to a plasma-resistant glass and a method for manufacturing same, wherein the content of components of the plasma-resistant glass can be controlled to reduce the thermal expansion coefficient of the glass and thereby prevent the glass from being damaged due to thermal shock when used at a high-temperature.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
HANSOL IONES CO LTD | 2061 ANSEONG-DAERO GOSAM MYEON GYEONGGI-DO ANSEONG-SI 17505 |
International Classification(s)

- 2022 Application Filing Year
- H01J Class
- 2261 Applications Filed
- 741 Patents Issued To-Date
- 32.78 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Kim, Dae Gun | Osan-si, KR | 17 | 8 |
# of filed Patents : 17 Total Citations : 8 | |||
Lee, KyungMin | Hwaseong-si, KR | 102 | 526 |
# of filed Patents : 102 Total Citations : 526 | |||
Lee, Mun ki | Suwon-si, KR | 6 | 5 |
# of filed Patents : 6 Total Citations : 5 | |||
Na, Hye In | Hwaseong-si, KR | 1 | 0 |
# of filed Patents : 1 Total Citations : 0 | |||
Seok, Hye Won | Osan-si, KR | 5 | 3 |
# of filed Patents : 5 Total Citations : 3 |
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Patent Citation Ranking
- 0 Citation Count
- H01J Class
- 0 % this patent is cited more than
- 1 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Feb 15, 2028 |
7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Feb 15, 2032 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Feb 15, 2036 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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