METHOD AND DEVICE FOR INTERFERENCE VARIABLE COMPENSATION DURING THE POSITIONING OF A SAMPLE SUPPORT
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United States of America Patent
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Aug 15, 2024
app pub date -
Jun 7, 2022
filing date -
Jun 7, 2021
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Abstract
A method and device for interference variable compensation during the positioning of a sample support during probe microscopy. The method includes measuring a distance to a first side of the sample support using a first distance sensor of a sensor support, and measuring a distance to a second side of the sample support opposite the first side using a second distance sensor of the sensor support, the distances being determined substantially in parallel with a first axis; measuring a distance to a third side of the sample support using a third distance sensor of the sensor support, and measuring a distance to a fourth side of the sample support opposite the third side using a fourth distance sensor of the sensor support, the distances being determined substantially in parallel with a second axis different from the first axis; positioning the sample support relative to the sensor support using a piezopositioner.
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