WASHING APPARATUS
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United States of America Patent
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Issued Date -
Aug 15, 2024
app pub date -
Feb 6, 2024
filing date -
Feb 10, 2023
priority date (Note) -
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Abstract
A washing apparatus includes: a housing; a holding part that holds a substrate arranged in the housing; a washing nozzle that supplies a washing liquid to the substrate held by the holding part; a gas nozzle that ejects a gas toward a ceiling of the housing; and a control part that controls the gas nozzle.
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