PACKAGING MEMBER FOR PACKAGING OBJECT TO BE TRANSPORTED BETWEEN CLEAN ROOMS, PACKAGING METHOD, AND TRANSPORTING METHOD
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United States of America Patent
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Issued Date -
Aug 8, 2024
app pub date -
May 26, 2022
filing date -
Jul 13, 2021
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Abstract
A packaging member for packaging an object to be transported between clean rooms, the packaging member being used for packaging the object to be transported, being a FOUP or a FOSB, when transport thereof between the clean rooms each having a clean atmosphere of a semiconductor factory, in which the packaging member includes a dust-free cloth having dust-proof property and damp-proof property. The packaging member is capable of transporting an object to be transported between clean rooms at low cost while maintaining the high cleanness of the object to be transported, being the FOUP or the FOSB.
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