VIBRATOR DEVICE
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United States of America Patent
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Issued Date -
Aug 1, 2024
app pub date -
Jan 30, 2024
filing date -
Jan 31, 2023
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Abstract
A vibrator device includes: a base including a semiconductor substrate having an integrated circuit disposed at a first surface; a vibration element electrically coupled to the integrated circuit; and a lid having an end surface of a side wall bonded to the first surface at a bonding portion. A first circuit of the integrated circuit includes a first circuit element disposed in a first region overlapping the bonding portion in a plan view. The first circuit element is a passive element or a transistor, and θ<90° is satisfied, θ being an angle formed by the first surface and an inner side surface of the side wall.
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