RADIO FREQUENCY MATCH STRAP ASSEMBLY
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United States of America Patent
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Issued Date -
Aug 1, 2024
app pub date -
Mar 11, 2024
filing date -
Jun 18, 2021
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Abstract
A radio frequency (RF) match assembly for a chemical vapor deposition processing chamber. The assembly includes a top electrically insulating column and a bottom electrically insulating column. The assembly further includes a one-piece RF match strap that has a head, a main body and a body extension. The main body of the one-piece RF match strap is configured to extend through the top electrically insulating column and the bottom electrically insulating column. A flexible chamber lid strap connects the processing chamber to the top of the one-piece RF match strap.
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