TUNABLE INTERFERENCE FILTER
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United States of America Patent
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Issued Date -
Aug 1, 2024
app pub date -
Jan 30, 2024
filing date -
Feb 1, 2023
priority date (Note) -
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Abstract
A tunable interference filter includes: a first substrate provided with a first reflection film; and a second substrate provided with a second reflection film facing the first reflection film with a gap between the first reflection film and the second reflection film. The first substrate includes a movable portion that is a portion where the first reflection film is provided, a diaphragm portion surrounding the movable portion, and a base portion supporting the movable portion via the diaphragm portion to allow displacement of the movable portion in a thickness direction, the diaphragm portion is a portion in which a thickness at the first substrate is thinner than a thickness of the base portion due to a groove opened in a surface of the first substrate, and a width of a bottom portion of the groove is larger than a width of an opening of the groove.
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