Importance

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Abstract

Proposed are an X-ray transmission inspection apparatus and an X-ray transmission inspection method, in which the size (planar area) a foreign object can be obtained with higher precision. The inspection apparatus includes an X-ray source configured to irradiate a sample with an X-rays, an X-ray sensor configured to detect transmitted X-rays, and a calculation part configured to calculate a planar area of a foreign object in the sample, wherein the calculation part obtains luminance distribution divided into a plurality of pixels according to luminance of the transmitted X-rays in a plane perpendicular to an irradiation direction of the X-rays, calculates, as numbers of effective pixels, numbers of the pixels having luminance reduction amounts greater than or equal to a luminance reduction threshold, and calculates the planar area of the foreign object based on the numbers of the effective pixels.

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First Claim