X-RAY TRANSMISSION INSPECTION APPARATUS AND X-RAY TRANSMISSION INSPECTION METHOD
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United States of America Patent
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Aug 1, 2024
app pub date -
Jan 12, 2024
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Jan 31, 2023
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Abstract
Proposed are an X-ray transmission inspection apparatus and an X-ray transmission inspection method, in which transmission images with large difference between irradiation angles are obtained so that the depth of the position of a foreign object can be obtained with high precision. The X-ray transmission inspection apparatus includes an X-ray source, an X-ray sensor configured to detect a transmitted X-ray, a moving mechanism configured to move the sample, and a calculation part configured to calculate a height position of a foreign object in a thickness direction in the sample, wherein the X-ray source performs irradiation with X-rays in a direction tilted with respect to the thickness direction of the sample and a transport direction of the sample, and the moving mechanism is capable of moving the sample in a first transport direction and in a second transport direction, and of changing X-ray irradiation angles.
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