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Abstract

Proposed are an X-ray transmission inspection apparatus and an X-ray transmission inspection method, in which transmission images with a large difference between irradiation angles are obtained so that the depth of the position of a foreign object can be obtained with high precision. The apparatus includes an X-ray source, an X-ray sensor configured to detect a transmitted X-ray, a sample moving mechanism configured to move the sample in a specific transport direction, and a calculation part configured to calculate a height position of a foreign object in a thickness direction in the sample on the basis of the transmitted X-ray detected by the X-ray sensor, wherein the X-ray source and the X-ray sensor include X-ray sources and X-ray sensors, the X-ray sources irradiate the sample with x-rays, and the X-ray sensors are disposed to respectively detect only transmitted X-rays of X-rays from the corresponding X-ray sources.

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First Claim