QUARTZ GLASS CRUCIBLE, MANUFACTURING METHOD THEREOF, AND MANUFACTURING METHOD OF SILICON SINGLE CRYSTAL

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United States of America Patent

APP PUB NO 20240254651A1
SERIAL NO

18290514

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Abstract

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A quartz glass crucible includes a crucible base body including silica glass and a coating film containing a crystallization accelerator and formed on the inner surface of the crucible base body. The average carbon concentration in the coating film, and the crucible base body within a range of 0 μm or more and 300 μm or less in depth from the inner surface of the crucible base body is 1.0×1012 atoms/cc or more and 3.0×1019 atoms/cc or less.

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Patent Owner(s)

Patent OwnerAddress
SUMCO CORPORATION1-2-1 SHIBAURA MINATO-KU TOKYO 105-8634

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
FUJIWARA, Hideki Tokyo, JP 114 691
KISHI, Hiroshi Akita, JP 143 1432
KITAHARA, Eriko Akita, JP 20 35
OHARA, Masami Akita, JP 11 38

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