SYSTEMS AND METHODS FOR WAFER DIE ASSEMBLY BONDING

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20240253974A1
SERIAL NO

18102070

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A wafer die assembly includes a first wafer having at least a central cavity defined therein. The wafer die assembly includes a second wafer mounted to the first wafer. At least one of the first or second wafers includes an etched pattern. The etched pattern including at least one peripheral cavity, and a raised area raised relative to the peripheral cavity. A method of assembling a wafer die assembly includes etching a central cavity into a first wafer and etching a pattern into at least one of the first wafer or a second wafer. The first wafer and/or the second wafer includes a raised area raised relative to the peripheral cavity or the central cavity. The method includes bonding the second wafer to the first wafer.

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Patent Owner(s)

Patent OwnerAddress
ROSEMOUNT AEROSPACE INC14300 JUDICIAL ROAD BURNSVILLE MN 55306-4898

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Backman, Roger Eagan, US 1 0
Frink, Sarah Inver Grove Heights, US 1 0
Potasek, David P Lakeville, US 33 139

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