LINEAR OR ROTARY TABLE MOVABLE IN TWO DIMENSIONS
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United States of America Patent
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Issued Date -
Aug 1, 2024
app pub date -
May 16, 2022
filing date -
May 17, 2021
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Abstract
A linear or rotary table is provided which can be moved in two dimensions having a stator and at least one upper slider plate movable relative to the stator in two independent translational directions or two independent rotary directions, and at least two piezoelectric linear drives for moving the upper slider plate in the two translational directions or two rotary directions, wherein a central slider plate is arranged between the stator and the upper slider plate, and the at least two piezoelectric linear drives are each attached to the stator to move the upper slider plate in the two translational directions or two rotary directions, and wherein at least one piezoelectric linear drive attached to the stator is in contact with the upper slider plate through an opening in the central slider plate to move the upper slider plate in a first translational direction or a first rotary direction.
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