COMPOSITE SUBSTRATE AND METHOD FOR PRODUCING COMPOSITE SUBSTRATE
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United States of America Patent
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Issued Date -
Jul 25, 2024
app pub date -
Feb 26, 2024
filing date -
Aug 27, 2021
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Abstract
A composite substrate includes: a support substrate; a piezoelectric film arranged above the support substrate; and a joining layer arranged between the support substrate and the piezoelectric film, wherein the piezoelectric film includes a polycrystalline substance having a degree of c-axis orientation determined by a Lotgering method of 80% or less, and wherein the joining layer includes an amorphous substance.
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