SUPPORT STRUCTURE OF INVERTED LAMELLA FOR TALL ROI
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Issued Date -
Jul 25, 2024
app pub date -
Jan 19, 2024
filing date -
Jan 19, 2023
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Lamellae with thin regions for TEM of regions of interest include oppositely situated S-shaped cut faces that define a waist region. In some examples, the waist has a thickness of less than 25 nm and defines a double tapered region of height of between 400 nm and 800 nm that is suitable for TEM. A portion of the lamella at the top surface can comprising a metallic or other coating than serves to support the lamella.
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