MULTI-FOCAL LASER MARKING, DICING, AND SCRIBING
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United States of America Patent
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Jul 25, 2024
app pub date -
Jan 24, 2024
filing date -
Jan 24, 2023
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Disclosed herein is an ultrafast, variable multi-focal technique using a laser (such as a picosecond laser or a femtosecond laser) to generate a pulsed laser beam, and a tunable acoustic gradient of index (TAG) lens ahead of an objective lens to achieve multi-focal laser scribing by shaping the pulsed laser beam pulse-by-pulse into a plurality of focal points along an axial axis of the laser beam at one or more selected positions without mechanically moving any optics or sample repositioning. The location of the focal points can be customized and even varied during processing.
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