Microelectromechanical System for Moving a Mechanical Part in Two Opposite Directions
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Jul 18, 2024
app pub date -
May 20, 2022
filing date -
May 21, 2021
priority date (Note) -
Published
status (Latency Note)
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Abstract
The invention relates to a microelectromechanical system (10) comprising a drive module (200) comprising:
- a fixed drive portion (210),a movable drive portion (220), anda suspension (230),the movable drive portion (220) being able to be moved relative to the fixed drive portion (210) in a first direction (A), as a result of an electrostatic force, which causes an elastic deformation of the suspension (230), and the movable drive portion (220) being able to be moved relative to the fixed drive portion (210) in a second direction (B), opposite to the first direction (A), as a result of an elastic return force generated by the suspension (230),the actuator (11) also comprising a stop (24) limiting the movement of the first movable portion (220) in the second direction (B) so that the elastic force generated by the suspension (230) is not cancelled.
First Claim
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