MEASURING METHOD AND MEASURING DEVICE
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United States of America Patent
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Issued Date -
Jul 18, 2024
app pub date -
Dec 21, 2023
filing date -
Jan 12, 2023
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Abstract
According to one embodiment, a measuring method includes forming a partition including a lower portion provided on a base and an upper portion which protrudes from a side surface of the lower portion, acquiring a first image generated by applying an electron beam to the partition for each of elements constituting the partition, analyzing the first image for each element, and measuring a protrusion amount of an end portion of the upper portion from the side surface of the lower portion based on the analysis result.
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