SYSTEM FOR PERFORMING ATOMIC FORCE MICROSCOPY, INCLUDING A GRID PLATE QUALIFICATION TOOL
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United States of America Patent
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Issued Date -
Jul 18, 2024
app pub date -
May 18, 2022
filing date -
May 19, 2021
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Abstract
An atomic force microscopy tool (AFM) configured for receiving a plate including a coordinate reference pattern on the plate, for providing a position reference for the AFM: and a device for qualifying a coordinate reference pattern in the AFM, comprising a fixed reference frame, a pattern encoder for reading the reference pattern, an actuation stage for relatively moving the plate and the pattern encoder parallel to the plate, a displacement measurement system for measuring a displacement of the plate or pattern encoder relative to the fixed reference frame, and a controller for controlling the actuation stage, the encoder, and the measurement system, arranged to identify imperfections in the coordinate reference pattern and their locations by controlling the displacement measurement system; and arranged for storing each imperfection coupled to the location determined.
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