METAL MASK STRUCTURE, PHOTOMASK FOR PREPARING SHIELDING LAYER, AND METHOD FOR PREPARING METAL MASK STRUCTURE BY USING PHOTOMASK

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20240240303A1
SERIAL NO

18402784

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention provides a metal mask structure, a photomask for preparing a shielding layer, and a method for preparing a metal mask structure by using a photomask. The metal mask structure includes a plate, and the plate at least includes: a pattern area formed with at least one slot; a non-pattern area arranged on one side of the pattern area; and a cutting groove extending along an extending direction between the pattern area and the non-pattern area. The cutting groove has an opening formed on a first surface of the plate, and an inner groove surface concave with respect to the first surface. The plate further includes at least one rib structure extending along the extending direction formed on the inner groove surface, and the at least one rib structure does not protrude from the opening.

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Patent Owner(s)

Patent OwnerAddress
DARWIN PRECISIONS CORPORATIONNO 20-1 GUANGFU N RD HUKOU TOWNSHIP HSINCHU COUNTY 30351

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HUANG, CHIAO-LING Hsinchu County, TW 10 11
Lin, Chi-Wei Hsinchu County, TW 47 172

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