MICROPROCESSING TREATMENT AGENT AND MICROPROCESSING TREATMENT METHOD
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United States of America Patent
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Jul 18, 2024
app pub date -
Jun 11, 2021
filing date -
May 20, 2021
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Abstract
Provided are a micromachining processing agent and a micromachining processing method that enable favorable micromachining while suppressing remaining of fine particles on an object to be processed having at least a silicon-containing insulating film. The micromachining processing agent according to the present invention is a micromachining processing agent for micromachining an object to be processed having at least a silicon-containing insulating film, the micromachining processing agent containing: a compound represented by a chemical formula (1) below; hydrogen fluoride; ammonium fluoride; and water,
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