MICROWAVE HEATING APPARATUS, AND METHOD FOR MANUFACTURING ALUMINUM NITRIDE BY USING SAME
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United States of America Patent
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Issued Date -
Jul 11, 2024
app pub date -
Feb 26, 2021
filing date -
Feb 26, 2021
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Abstract
A microwave heating apparatus according to the present disclosure includes a housing, a drum unit disposed rotatably on the housing and into which heating target substance and gas are introduced, and at least one heating unit heating the drum unit by applying microwaves to the drum unit. With a microwave heating apparatus and a method for manufacturing an aluminum nitride using the same of the present disclosure, an aluminum nitride may be manufactured at a lower temperature than that of conventional methods, thereby reducing manufacturing time. Additionally, a microwave heating apparatus according to the present disclosure may significantly reduce power consumption compared to an electric heating apparatus.
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