MICRO-MIRROR FRINGE FIELD ELECTRODE DESIGN WITH MISALIGNMENT COMPENSATION
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Jul 11, 2024
app pub date -
Dec 27, 2023
filing date -
Jan 5, 2023
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Abstract
In one example, an apparatus includes a substrate, an electrode layer on the substrate, and a hinge layer. The electrode layer has N linear electrode edges on a side of a centerline of the electrode layer, N being an odd number greater than or equal to 3. The hinge layer has N linear hinge edges on the side of the centerline. A first edge of the linear hinge edges is spaced apart from a closest second edge of the linear electrode edges by a first lateral gap distance. A third edge of the linear hinge edges is spaced apart from a closest fourth edge of the linear electrode edges by a second lateral gap distance different from the first lateral gap distance.
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