INFRARED SENSOR AND ITS REFERENCE ELEMENT AND MANUFACTURING METHOD OF THE REFERENCE ELEMENT
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United States of America Patent
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Issued Date -
Jul 11, 2024
app pub date -
Jan 6, 2023
filing date -
Jan 6, 2023
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Abstract
A reference element of an infrared sensor includes a substrate, a sacrificial layer, a supporting structure, a fence structure and an infrared sensing structure. The sacrificial layer is disposed on the substrate. The supporting structure is disposed on the substrate wherein the top surface of the supporting structure is coplanar with the top surface of the sacrificial layer. The fence structure is disposed on the substrate and surrounds the sacrificial layer wherein the top surface of the fence structure is coplanar with the top surface of the sacrificial layer, and there is an air gap between the fence structure and the supporting structure. The infrared sensing structure is disposed on the sacrificial layer, the supporting structure and the fence structure, and the infrared sensing structure has an opening corresponding to the air gap.
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