NON-CONTACT PROBE
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United States of America Patent
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Issued Date -
Jul 11, 2024
app pub date -
Jan 3, 2024
filing date -
Jan 5, 2023
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status (Latency Note)
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Abstract
A non-contact probe includes: a light irradiating section that scans a measurement target object with spot-like laser beam; an image-capturing section that captures an image of the laser beam reflected by the measurement target object by using a plurality of pixel columns selected from a light-reception surface including a plurality of pixel columns, and generates a captured image; a position sensing section that senses an image-formation position of the laser beam on the captured image; and a pixel column changing section that selects a different plurality of pixel columns such that the image-formation position is included in the selected plurality of pixel columns.
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