Component for Manufacturing Micro- and/or Nanostructured Devices and Method of Manufacturing the Same
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United States of America Patent
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Issued Date -
Jul 11, 2024
app pub date -
Jan 11, 2024
filing date -
Jan 11, 2023
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Abstract
Disclosed is a component for manufacturing micro- and/or nanostructured devices. The component has a base body and a surface which has micro- or nanostructures which form a substantially flat support surface, and between which trenches extend with a statistical distribution, to which a vacuum can be applied. Also disclosed is a method of manufacturing such a component.
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