Piezo-actuated MEMS Resonator
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United States of America Patent
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Issued Date -
Jul 4, 2024
app pub date -
Jan 2, 2024
filing date -
Feb 9, 2014
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Abstract
A microelectromechanical system (MEMS) resonator includes a degenerately-doped single-crystal silicon layer and a piezoelectric material layer disposed on the degenerately-doped single-crystal silicon layer. An electrically-conductive material layer is disposed on the piezoelectric material layer opposite the degenerately-doped single-crystal silicon layer, and patterned to form first and second electrodes.
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