SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD

United States of America Patent

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Issued Date
Jul 4, 2024
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Dec 16, 2023
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Dec 28, 2022

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Abstract

Proposed are a substrate treatment system and a substrate treatment method. More particularly, a technology capable of realizing a fine etching adjustment and capable of increasing a Unit Per Equipment Hour (UPEH) by reducing time required for a process is provided.

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SEMES CO LTD	77 4SANDAN 5-GIL JIKSAN-EUP SEOBUK-GU CHEONAN-SI CHUNGCHEONGNAM-DO

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Inventor Name	Address	# of filed Patents	Total Citations
CHOI, Sung Min	Osan-si, KR	51	352
HONG, Jin Hee	Hwaseong-si, KR	9	1
JANG, Dong Young	Seongnam-si, KR	14	19
JEON, Min Sung	Osan-si, KR	12	25
JEON, Young Eun	Ulsan-si, KR	8	1
JIN, Young Jo	Hwaseong-si, KR	5	1
KIM, Yun Sang	Seongnam-si, KR	32	24
LEE, Tae Hwan	Cheonan-si, KR	9	24

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SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

18542665

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18542665

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