METHOD FOR MANUFACTURING A HEAD FOR IRRADIATING A TARGET WITH A BEAM OF CHARGED PARTICLES
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United States of America Patent
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Issued Date -
Jul 4, 2024
app pub date -
Jul 1, 2021
filing date -
Jul 10, 2020
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Abstract
This method for manufacturing an irradiating head includes:—providing a gun emitting a primary beam of charged particles along a propagation axis, this primary beam having a spatial distribution of charged particles having a median density Dmed1 of charged particles located at a distance d1 from the propagation axis,—the design and manufacture of a sensor capable of measuring the intensity of a beam of charged particles, this sensor comprising:—an outlet face by means of which a secondary beam of charged particles results having a spatial distribution having a median density Dmed2 of charged particles, this median density Dmed2 being located at a distance d2 from the propagation axis, and—a semiconductor layer. The design of the sensor includes selecting a thickness for the semiconductor layer, wherein the distance d2 is twice as large as the distance d1.
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