EXTREME ULTRAVIOLET EXPOSURE APPARATUS INCLUDING A MASK STAGE
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United States of America Patent
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Issued Date -
Jul 4, 2024
app pub date -
Nov 27, 2023
filing date -
Dec 29, 2022
priority date (Note) -
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Abstract
A mask stage, including a body, a support on a lower surface of the body including an attachable extreme ultraviolet mask, a fiducial mark on the lower surface of the body and spaced apart from the support, and a sensor area including a plurality of measurement sensors configured to measure an energy of a portion of extreme ultraviolet light incident on the body, wherein the sensor area is on the lower surface of the body and is spaced apart from the support in a scan direction of the extreme ultraviolet light, and the plurality of measurement sensors are spaced apart from one another in a direction perpendicular to the scan direction.
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