BIOSENSOR BASED ON METAL OXIDE THIN FILM TRANSISTOR AND MANUFACTURING METHOD FOR THE SAME
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United States of America Patent
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Issued Date -
Jul 4, 2024
app pub date -
Dec 29, 2023
filing date -
Dec 29, 2022
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Provided is a semiconductor-based DNA sensor which includes: a first electrode and a second electrode disposed on a substrate to be spaced apart from each other; a channel layer disposed between the first electrode and the second electrode; a target coupling layer disposed on the channel layer, and including probe DNA detecting target DNA through a hybridization reaction; a passivation layer selectively exposing an upper portion of the target coupling layer; and a gate layer disposed at a lower portion and/or an upper portion of the substrate, or an upper portion of the target coupling layer, in which the channel layer includes a metal oxide and a carbon nano tube.
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