JIG FOR MEASURING TEMPERATURE AND HUMIDITY OF RETICLE CARRIER
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United States of America Patent
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Issued Date -
Jul 4, 2024
app pub date -
Dec 30, 2022
filing date -
Dec 30, 2022
priority date (Note) -
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Abstract
A jig for measuring temperature and humidity of a reticle carrier comprises: a jig body, a detection module, a wireless communication module and a capacitor, the jig body has a storage space, at least one air inlet hole and at least one air outlet hole communicated to the storage space; the detection module includes a thermometer and a hygrometer, the thermometer and the hygrometer are disposed in the storage space; the wireless communication module is connected to the thermometer and the hygrometer by signal; the capacitor is electrically connected to the detection module and the wireless communication module. The jig for measuring temperature and humidity of the reticle carrier of the present disclosure is used to keep tabs on the temperature and humidity and the changes inside the reticle carrier.
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