JIG FOR AUTOMATICALLY MEASURING FLOW RATE OF RETICLE CARRIER
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United States of America Patent
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Issued Date -
Jul 4, 2024
app pub date -
Dec 30, 2022
filing date -
Dec 30, 2022
priority date (Note) -
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Abstract
A jig for automatically measuring flow rate of a reticle carrier comprises a jig body, a flow rate detection module, a wireless communication module, a capacitor and a wireless charging receiving module. The jig body has a storage space, at least one gas inlet hole and at least one gas outlet hole communicated to the storage space. The flow rate detection module includes a flowmeter and a flow indicator connected to the flowmeter by a signal, the flowmeter is disposed in the storage space. The wireless communication module is connected to the flowmeter by a signal. The capacitor is electrically connected to the flow rate detection module and the wireless communication module. The wireless charging receiving module is disposed at a bottom of the jig body, and electrically connected to the capacitor.
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