GLASS BLOCK AND METHOD FOR PRODUCING SAME, AND MEMBER FOR SEMICONDUCTOR PRODUCTION APPARATUS
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United States of America Patent
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Issued Date -
Jul 4, 2024
app pub date -
Mar 11, 2024
filing date -
Sep 14, 2021
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
The present invention relates to a glass block including: Si; and at least one of Mg and Ca, and satisfying, in terms of mol %, 49.0% or less of B2O3, 11.5% or less of P2O5, 10.0 to 59.5% of a (=SiO2+B2O3+P2O5+GeO2), 66.5% or less of (a+Al2O3), 7.0% or less of Ga2O3, 0.44 or less of b (=Al2O3+Ga2O3+In2O3)/a, 20.0% or more of R2O (R2: alkaline earth metal), 50.0% or less of MgO, MgO≥BaO, CaO≥BaO, SrO≥BaO, MgO≥SrO, CaO≥SrO, 1.2% or less of R12O (R1: alkali metal), 4.8% or less of TiO2 or ZrO2, 9.5% or less of MnO2, 11.8% or less of ZnO, 0.067 or less of Ta2O5/SiO2, 15.0% or less of an impurity element, and 0.20 or less of F/O.
First Claim
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