SUBSTRATE PROCESSING APPARATUS
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United States of America Patent
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Issued Date -
Jun 27, 2024
app pub date -
Dec 21, 2022
filing date -
Dec 31, 2021
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Abstract
There is provided a substrate processing apparatus. The substrate processing apparatus may include a substrate supporter supporting a substrate, a processing solution feeder supplying a processing solution to the substrate, first and second recovery containers configured to recover the processing solution, a first pipe connected to the first recovery container and including an insulating material, a second pipe connected to the second recovery container and including an insulating material, a first static electricity eliminator in contact with the first pipe, a second static electricity eliminator in contact with the second pipe, and a plurality of first conductive lines connected to the first and second static electricity eliminators.
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