FIDUCIAL MARKER DESIGN, FIDUCIAL MARKER, SCANNING PROBE MICROSCOPY DEVICE AND METHOD OF CALIBRATING A POSITION OF A PROBE TIP
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United States of America Patent
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Issued Date -
Jun 27, 2024
app pub date -
Apr 28, 2022
filing date -
Apr 28, 2021
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Abstract
The invention is directed at a fiducial marker design, a fiducial marker, a scanning probe microscopy device and a method of calibrating a position of a probe tip. The fiducial marker design may be used as a fiducial marker for providing a positioning reference, and comprises at least one first reference pattern including at least one first reference element for enabling determination of a relative position of the fiducial marker with respect to a first sensor. The first sensor is configured for operating at a first scale of dimension. The fiducial marker further comprises a second reference pattern, which comprises a regular arrangement of markings, structured or shaped such as to encode therein surface coordinate information. This enables determination of a relative position of each marking with respect to a second sensor configured for operating at a second scale of dimension smaller than the first scale of dimension.
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