METHOD OF CALIBRATING IN A SCANNING PROBE MICROSCOPY SYSTEM AN OPTICAL MICROSCOPE, CALIBRATION STRUCTURE AND SCANNING PROBE MICROSCOPY DEVICE
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United States of America Patent
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Issued Date -
Jun 27, 2024
app pub date -
Apr 28, 2022
filing date -
Apr 29, 2021
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Abstract
The present document relates to a method of calibrating, in a scanning probe microscopy system, an optical microscope. The optical microscope is configured for providing a reference data for positioning a probe tip on a surface of a substrate. The calibration is performed using a calibration structure being a spatial structure including features at different Z-levels relative to a Z-axis, the Z-axis being perpendicular to the surface of the substrate. The method comprises a step of obtaining, with the optical microscope, at least two images of at least a part of the calibration structure. The at least two images are focused in at least two different levels of the Z-levels. The method further comprises a step of determining a lateral shift, in a direction perpendicular to the Z-axis, of the calibration structure as depicted in the at least two images focused in the at least two different levels. The invention is further directed at a calibration structure, a substrate carrier and scanning probe microscopy device.
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