TiO2-CONTAINING SILICA GLASS SUBSTRATE
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United States of America Patent
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Jun 27, 2024
app pub date -
Jan 29, 2024
filing date -
Sep 8, 2021
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Abstract
The present invention relates to a TiO2-containing silica glass substrate that: contains 6.7-12 mass % of TiO2, expressed as a mass percentage on an oxide basis; has a CTE-slope of 1.40 ppb/K/K or less; and, in at least one main surface and at least one end surface, (A) no striae are observed in a stria evaluation in compliance with JOGIS 11-2008, or (B) the striation intensity corresponds to class A under US military specification MTL-G-174 B.
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