ACTUATOR, TILT CONTROL DEVICE, POSITIONING DEVICE, PROCESSING APPARATUS, AND DEVICE MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Jun 27, 2024
app pub date -
Dec 21, 2023
filing date -
Dec 23, 2022
priority date (Note) -
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Abstract
An actuator includes: a fixed part; a movable part; a drive unit that drives the movable part relative to the fixed part along a driving direction; a guide portion that extends in the driving direction in the fixed part and guides driving of the movable part by the drive unit along the driving direction; and a gas supply portion that supplies gas between the movable part and the guide portion, in which the guide portion is located at a center of the movable part when viewed in the driving direction.
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