AMPOULE FOR A SEMICONDUCTOR MANUFACTURING PRECURSOR
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United States of America Patent
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Issued Date -
Jun 27, 2024
app pub date -
Dec 22, 2022
filing date -
Dec 22, 2022
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Abstract
Ampoules for a semiconductor manufacturing precursors and methods of use are described. The ampoules include a container with an inlet port and an outlet port. The ampoules comprise an inlet plenum located between the inlet port and the cavity and an outlet plenum located between the outlet port and the cavity. A flow path is defined by a plurality of tubular walls and a flow ingress openings of the ampoule adjacent bottom edges of the tubular walls, through which a carrier gas flows in contact with the precursor.
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