VAPORIZER AND LIQUID MATERIAL VAPORIZING DEVICE

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United States of America Patent

APP PUB NO 20240198250A1
SERIAL NO

18545984

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Abstract

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A vaporizer includes a vaporization chamber in which a liquid material is heated and vaporized and a heat exchange element arranged in the vaporization chamber. The vaporization chamber has a groove in its inner surface. This helps improve vaporization performance of the liquid material and the vaporization of the liquid material at a high flow rate.

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Patent Owner(s)

Patent OwnerAddress
HORIBA STEC CO LTD11-5 HOKOTATE-CHO KAMITOBA MINAMI-KU KYOTO-SHI KYOTO 601-8116

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
NISHIWAKI, Keisuke Kyoto-shi, JP 2 0

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