MANUFACTURING METHOD OF METAL MASK AND METAL MASK THEREOF
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United States of America Patent
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Issued Date -
Jun 13, 2024
app pub date -
May 18, 2023
filing date -
Dec 7, 2022
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Abstract
A manufacturing method of a metal mask comprises: providing a metal plate having a first surface and a second surface opposite to each other, and the first surface has preset opening regions; forming a first photoresist layer on the first surface which has first apertures corresponding to the preset opening regions respectively, and each preset opening region is partially exposed to each first aperture, and an area of the first aperture is 75%-100% of an area of the preset opening region; forming a second photoresist layer on the second surface which has second apertures, and the second surface is exposed to the second apertures; forming first etching parts on the first surface and corresponding to the first apertures respectively, and each first etching part has a first opening located in each preset opening region; forming second etching parts on the second surface and corresponding to the second apertures respectively.
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