SHOWER HEAD ASSEMBLY AND FILM FORMING APPARATUS
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United States of America Patent
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Issued Date -
Jun 13, 2024
app pub date -
Dec 11, 2023
filing date -
Dec 12, 2022
priority date (Note) -
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Abstract
A shower head assembly, which is disposed in a film forming apparatus that alternately repeats film formation and etching to form a metal film in a recess formed in a substrate, includes: a first plate having arc-shaped first slits formed in the first plate; and a second plate having arc-shaped second slits formed in the second plate, wherein the second plate is disposed below the first plate to vertically overlap with the first plate, and the second slits are formed at locations such that the second slits do not overlap with the first slits in a plan view.
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