MOLYBDENUM PRECURSORS AND RELATED METHODS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20240190718A1
SERIAL NO

18533684

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Molybdenum precursors with high purity and methods for purifying molybdenum precursors are provided. A method comprises obtaining a first vessel comprising a solid reagent; vaporizing at least a portion of the solid reagent to produce a vapor comprising a MoCl5 vapor and a molybdenum impurity vapor; flowing at least a portion of the MoCl5 vapor and at least a portion of the molybdenum impurity vapor to a second vessel; condensing at least a portion of the MoCl5 vapor in the second vessel to separate the MoCl5 from the molybdenum impurity; and removing at least a portion of the molybdenum impurity vapor from the second vessel to obtain a MoCl5 precursor.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD ROAD BILLERICA MA 01821

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Garrett, Benjamin R Leander, US 10 0
Hendrix, Bryan Clark Danbury, US 7 20
Ocampo, Cristian Cedar Park, US 3 0
Press, Loren Burnet, US 3 0
Valdez, Juan Copperas Cove, US 5 71
Watson, Michael Leander, US 39 191
Wright,, JR Robert L Newtown, US 14 72

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation