CARRIER WITH ROTATION PREVENTION FEATURE
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United States of America Patent
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Issued Date -
Jun 13, 2024
app pub date -
Dec 12, 2022
filing date -
Dec 12, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A carrier includes a carrier body, fingers attached to the carrier body, and a rotation prevention component attached to the carrier body. The fingers are configured to support a process kit ring. The rotation prevention component is configured to be disposed proximate a flat inner surface of the process kit ring to prevent rotation of the process kit ring.
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