PLASMA GAS GENERATOR
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United States of America Patent
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Issued Date -
Jun 13, 2024
app pub date -
Jul 19, 2023
filing date -
May 13, 2011
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Abstract
A method of generating an output gas, comprising plasmatizing an input gas with RF power propagating from a tip of an electrode to form an annular plasma sheath constrained by a tube with said RF power propagating within said annular plasma sheath; and forming said output gas as said annular plasma sheath propagates away from said tip of said electrode.
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