Time-Series Segmentation and Anomaly Detection
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United States of America Patent
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Issued Date -
Jun 6, 2024
app pub date -
Dec 1, 2023
filing date -
Dec 2, 2022
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Abstract
Detection of data anomalies resulting from maintenance activities on semiconductor processing equipment. Time-series representation of the key indicators for equipment performance is cleaned then segmented according to sharp breaks in the data. The cleaned and segmented data is modeled, for example, by determining a linear fit for each segment. The slope and intercept of each modeled segment linear fit are compared and evaluated to identify anomalies in the data.
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