LARGE DISPLACEMENT PRECISION POSITIONING ADJUSTMENT APPARATUS
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United States of America Patent
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Issued Date -
Jun 6, 2024
app pub date -
Nov 14, 2023
filing date -
Dec 5, 2022
priority date (Note) -
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Abstract
Proposed is a large displacement precision positioning adjustment apparatus including a mirror at an upper end, a fixed plate at a lower portion, linear driving parts including a linear driver performing a large displacement fine operation and a movement supporting part including a guide guiding a movement direction and a fixing part fixing the driver. The linear driver includes a first rotation driving part performing a large displacement movement, a third rotation driving part, a second rotation driving part performing a fine movement, and a moving shaft. The linear driving part includes an upper end connection part connecting an upper end of the linear driving part to the mirror, and a lower end connection part connecting a lower end of the linear driving part and the fixed plate, a first controller controlling a position of the linear driving part, and a second controller controlling a position of the mirror.
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